Engineering Subsystems Interfaced with Process Control

• Bakeout (WBS3)

• Vacuum/Pumping (WBS3)

• Gas Delivery (WBS3)

• Water/Cooling (WBS3)

• FCPC (non-real-time) (WBS5)

• Plasma/Power Supply Control System (WBS6)

• Synchronization System (WBS6)

• GDC (WBS3)

• HHFW (WBS2)

• CHI (WBS2)

• ECH (WBS2)

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